Patent holdings for IPC class H01J 37/05

Total number of patents in this class: 324

10-year publication summary

25
28
21
32
41
41
29
28
19
6
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Hitachi High-Technologies Corporation
2034
25
Hitachi High-Tech Corporation
4424
24
Applied Materials, Inc.
16587
22
ASML Netherlands B.V.
6816
19
Axcelis Technologies, Inc.
429
18
Varian Semiconductor Equipment Associates, Inc.
1282
16
Exogenesis Corporation
77
16
FEI Company
851
14
JEOL Ltd.
556
13
mi2-factory GmbH
30
13
NuFlare Technology, Inc.
770
7
Sumitomo Heavy Industries ION Technology Co., Ltd.
96
7
Carl Zeiss MultiSEM GmbH
85
7
Applied Materials Israel, Ltd.
549
6
Gatan, Inc.
111
6
Nissin ION Equipment Co., Ltd.
78
6
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
149
5
KLA Corporation
1223
5
Battelle Memorial Institute
2356
4
Scienta Omicron AB
18
4
Other owners 87